27 September 2026 to 2 October 2026
GADEST 2026 - San Servolo Island, Venice (Italy)
Europe/Rome timezone

Plasma enhanced Atomic Layer Etching on Nitrides and SiC for high power and photonic application

30 Sept 2026, 09:50
40m
Auditorium Hall

Auditorium Hall

Invited presentation Wide Band Gap Materials - II Nitride Semiconductors

Speaker

Dr Franziska C. Beyer (deutsch)

Author

Dr Franziska C. Beyer (deutsch)

Co-authors

Christian Miersch Prof. Johannes Heitmann Martin Siebert Dr Sarah Seidel

Presentation materials

There are no materials yet.