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GADEST 2026

27 September 2026 to 2 October 2026
GADEST 2026 - San Servolo Island, Venice (Italy)
Europe/Rome timezone

3D chemical mapping of dopant distribution in epitaxially grown heavily doped Si:P and SiGe:B using atom probe tomography

1 Oct 2026, 17:50
20m
Auditorium Hall

Auditorium Hall
Oral presentation Advanced Characterization - I Advanced Characterization techniques

Speaker

Maryna Dryhailo (CEA-Leti & SIMaP, Grenoble INP)

Authors

Dr Adeline Grenier (Univ. Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France) Dr Frédéric De Geuser (Univ. Grenoble Alpes, CNRS, Grenoble INP, SIMaP, F-38000 Grenoble, France) Dr Isabelle Mouton (Univ. Grenoble Alpes, CNRS, Grenoble INP, SIMaP, F-38000 Grenoble, France) Maryna Dryhailo (CEA-Leti & SIMaP, Grenoble INP)

Co-authors

Joël Kanyandekwe (Univ. Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France) Dr Justine Lespiaux (Univ. Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France) Dr Nicolas Bernier (Univ. Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France) Dr Nicolas Gauthier (Univ. Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France) Dr Thomas Jalabert (Univ. Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France)

Presentation materials

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