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GADEST 2026

27 September 2026 to 2 October 2026
GADEST 2026 - San Servolo Island, Venice (Italy)
Europe/Rome timezone

Comparative study of void defect annihilation in Si (100) and Si (110) wafers during high-temperature rapid thermal processing

28 Sept 2026, 19:00
3h
Grecale Hall E

Grecale Hall E
Board: 2
Poster presentation Poster Session - 1

Speaker

Mr Takuya Kusunoki (Graduate School of Computer Science and Systems Engineering, Okayama Prefectural University, Technology Group, Technology Department, GlobalWafers Japan Co., Ltd)

Author

Mr Takuya Kusunoki (Graduate School of Computer Science and Systems Engineering, Okayama Prefectural University, Technology Group, Technology Department, GlobalWafers Japan Co., Ltd)

Co-authors

Mr Ken Hayakawa (Technology Group, Technology Department, GlobalWafers Japan Co., Ltd.) Dr Haruo Sudo (Technology Group, Technology Department, GlobalWafers Japan Co., Ltd.) Mr Hisashi Matsumura (Technology Group, Technology Department, GlobalWafers Japan Co., Ltd.) Prof. Koji Sueoka (Faculty of Computer Science and Systems Engineering, Okayama Prefectural University)

Presentation materials

There are no materials yet.