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GADEST 2026

27 September 2026 to 2 October 2026
GADEST 2026 - San Servolo Island, Venice (Italy)
Europe/Rome timezone

Engineering Ultrasmooth Sub-Nanometer Interlayers via Chemical Modulation for Suppression of Interface Defects in Advanced Si/HfO2 MOS Technology

28 Sept 2026, 15:20
20m
Auditorium Hall

Auditorium Hall
Oral presentation Alternative Semiconductor Devices - I Alternative Semiconductor Devices

Speaker

Mr Yu-Chen Chang (Institute of Semiconductor Electronics, RWTH Aachen University, 52074 Aachen, Germany)

Author

Mr Yu-Chen Chang (Institute of Semiconductor Electronics, RWTH Aachen University, 52074 Aachen, Germany)

Co-authors

Prof. David Rafaja (Institute of Materials Science, TU Bergakademie Freiberg, 09599 Freiberg, Germany) Ms Jingxuan Sun (Peter Grünberg Institute (PGI-9), Forschungszentrum Jülich, 52428 Jülich, Germany) Prof. Joachim Knoch (Institute of Semiconductor Electronics, RWTH Aachen University, 52074 Aachen, Germany) Mr Martin Kasavetov (Bioelectronics, Institute of Biological Information Processing-3, Forschungszentrum Jülich, 52428 Jülich, Germany) Dr Mykhaylo Motylenko (Institute of Materials Science, TU Bergakademie Freiberg, 09599 Freiberg, Germany) Dr Qing-Tai Zhao (Peter Grünberg Institute (PGI-9), Forschungszentrum Jülich, 52428 Jülich, Germany) Dr Viviana Rincón Montes (Bioelectronics, Institute of Biological Information Processing-3, Forschungszentrum Jülich, 52428 Jülich, Germany) Ms Yu-Tzu Liao (Peter Grünberg Institute (PGI-9), Forschungszentrum Jülich, 52428 Jülich, Germany)

Presentation materials

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